Mitutoyo FS70Z 1x-2x Zoom Microscope Body for Semiconductor Inspection, Brightfield
MitutoyoFeatures:
- Erect Image Trinocular (50/50, 100/100), Erect Image Tilting Trinocular (50/50)
- Mitutoyo Infinity Corrected Optics
- Siedentopf Design Trinocular Body Tube
- Choice of WF10x/24 or WF20x/12 eyepieces
- FS70Z - Main Body (Non-Laser) with 1x-2x Zoom Magnification Changer
- Brightfield Objective Magnification Selections from 1x to 200x
- Extra Long Working Distance Plan Apochromat Objectives
- Differential Interference Contrast (DIC) Option for Nonlaser Configurations
- Reverse 4x Nosepiece
- Optional Motorized 4x Centerable Nosepiece
- Six-foot Cable Remote Intensity Control for Fiber Optic Illuminator
- Concentric Coarse and Fine Focus -0.1mm Rev /Fine Focus
- Manual Focus Block
- 1 Year warranty
Product Specifications
Model Part # | FS70Z 378-185-1 | FS70Z-TH 378-185-3 |
Short Base Model Part # | FS70Z-S 378-185-2 | FS70Z-THS 378-185-4 |
Focus adjustment | 50mm travel range with concentric coarse (3.8mm/rev) and fine (0.1mm/rev) focusing wheels (right / left) | |
Image | Erect image | |
Pupil distance | Siedentopf type, adjustment range: 2 - 3" / 51 - 76mm | |
Field number | 24 | |
Tilt angle | - | 0° - 20° |
Optical pass ratio | 50/50 | 100/0 or 0/100 |
Protective filter | - | |
Tube lens | 1x - 2x Zoom | |
Applicable laser | - | |
Camera mount | C-mount (using optional adapter B) | |
Illumination system, optional | Reflective illumination for bright field (Koehler illumination, with aperture diaphragm) 12V 100W fiber optics, non-stepped adjustment, light guide length: 1.5m, power consumption 150W | |
Objective, optional (for observation) | M Plan Apo, M Plan Apo SL, G Plan Apo | |
Objective, optional (for laser-cutting) | - | |
Loading weight* | 31lbs / 14.1kg | 29lbs / 13.2kg |
Mass (main unit) | 14.5lbs / 6.6kg | 16.5lbs / 7.5kg |
*Loading weight on optical tube excluding weight of objective lenses and eyepieces.
Turret Choices
Supported observation | Bright field (M Plan Apo/G Plan Apo) | ||
Model No. | 378-018 | 378-016A | 378-216A |
Driving method | Manual | Electric | |
Objective positions | 4 | 5 |
Objective Choices
M Plan Apo Objectives
Compatible observation method: Bright-field observation, simple polarized observation, differential interference observation
Advantage: Plan apochromat lenses free of spherical aberration/chromatic aberration are adopted to obtain images with excellent color reproducibility without blur over the entire field of view.
M Plan Apochromat Brightfield Objectives | ||||||||
Model No. | Magnification | N.A. | W.D. | Focal distance | Resolving power | Focal depth | View field with eyepiece | View field with CCD camera |
378-800-3 | 1X | 0.025 | 11.0mm | 200mm | 11.0μm | 440μm | ø24mm | 4.8 x 6.4mm |
378-801-6 | 2X | 0.055 | 34.0mm | 100mm | 5.0μm | 91μm | ø12mm | 2.4 x 3.2mm |
378-802-6 | 5X | 0.14 | 34.0mm | 40mm | 2.0μm | 14.0μm | ø4.8mm | 0.96 x 1.28mm |
378-807-3 | 7.5X | 0.21 | 35.0mm | 26.67mm | 1.3μm | 6.2μm | ø3.6mm | 0.64 x 0.85mm |
378-803-3 | 10X | 0.28 | 34.0mm | 20mm | 1.0μm | 3.5μm | ø2.4mm | 0.48 x 0.64mm |
378-804-3 | 20X | 0.42 | 20.0mm | 10mm | 0.7μm | 1.6μm | ø1.2mm | 0.24 x 0.32mm |
378-805-3 | 50X | 0.55 | 13.0mm | 4mm | 0.5μm | 0.9μm | ø0.48mm | 0.10 x 0.13mm |
378-806-3 | 100X | 0.70 | 6.0mm | 2mm | 0.4μm | 0.6μm | ø0.24mm | 0.05 x 0.06mm |
M Plan Apochromat Brightfield Super Long (SL) Working Distance Objectives | ||||||||
378-810-3 | 20X | 0.28 | 30.5mm | 10mm | 1.0μm | 3.5μm | ø1.2mm | 0.24 x 0.32mm |
378-811-15 | 50X | 0.42 | 20.5mm | 4mm | 0.7μm | 1.6μm | ø0.48mm | 0.10 x 0.13mm |
378-813-3 | 100X | 0.55 | 13.0mm | 2mm | 0.5μm | 0.9μm | ø0.24mm | 0.05 x 0.06mm |
378-816-3 | 200X | 0.62 | 13.0mm | 1mm | 0.4μm | 0.7μm | ø0.12mm | 0.025 x 0.03mm |
M Plan Apochromat High Resolution (HR) Brightfield Objectives | ||||||||
378-814-4 | 50X | 0.75 | 5.2mm | 4mm | 0.4μm | 0.49μm | ø0.48mm | 0.10 x 0.13mm |
378-815-4 | 100X | 0.90 | 1.3mm | 2mm | 0.3μm | 0.34μm | ø0.24mm | 0.05 x 0.06mm |
G Plan Apo Objectives
Compatible observation method: Observation through a cover glass
Advantage: Correction design is performed so as to obtain optimal observation images when observing through the glass. (Corrected on the basis of BK7 and a cover glass thickness of 3.5mm. Custom order of other glass material and thickness is also available.)
G Plan Apochromat Brightfield Objectives with Cover Slip Corrections | ||||||||
Model No. | Magnification | N.A. | W.D. | Focal distance | Resolving power | Focal depth | View field with eyepiece | View field with CCD camera |
378-847 | 20X | 0.28 | 29.42mm* | 10mm | 1.0μm | 3.5μm | ø1.2mm | 0.24 x 0.32mm |
378-848-3 | 50X | 0.50 | 13.89mm* | 4mm | 0.6μm | 1.1μm | ø0.48mm | 0.10 x 0.13mm |
* Air conversion
Optional Stand: For mounting the VMU, WIDE VMU, or FS70 microscope unit. Can be combined with an XY stage, stage illumination unit and fiber-optic illuminator to work as a compact microscope for surface observation.
Optional Illumination:
Stage illumination unit (Transmitted): Attaches to the stand to provide contour illumination in conjunction with a fiber-optic illuminator (100W or 150W).
Fiber-optic Illumination Unit (Reflective): 12V 100W Halogen illumination unit or 12V 150W Halogen illumination unit.
- Weight:
- 268.00 LBS
- Width:
- 40.00 (in)
- Height:
- 40.00 (in)
- Depth:
- 40.00 (in)
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