Mitutoyo FS70L Standard Microscope Body for Semiconductor Inspection, Brightfield, Laser
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Mitutoyo
Mitutoyo FS70L Standard Microscope Body for Semiconductor Inspection, Brightfield, Laser
Features:
- Erect Image Trinocular (50/50, 100/100), Erect Image Tilting Trinocular (50/50)
- Mitutoyo Infinity Corrected Optics
- Siedentopf Design Trinocular Body Tube
- Choice of WF10x/24 or WF20x/12 eyepieces
- FS70L - Main Body 1X for Three YAG Laser Wave lengths 1064/532/355nm*
- Brightfield Objective Magnification Selections from 1x to 200x
- Extra Long Working Distance Plan Apochromat Objectives
- Laser Cutting Objectives
- Long Working Distance Plan Objectives for IR, NIR, UV and NUV applications
- Reverse 4x Nosepiece
- Optional Motorized 4x Centerable Nosepiece
- Six-foot Cable Remote Intensity Control for Fiber Optic Illuminator
- Concentric Coarse and Fine Focus -0.1mm Rev /Fine Focus
- Manual Focus Block
- 1 Year warranty
* Mitutoyo assumes no responsibility for the performance and/or safety of the laser system used with Mitutoyo microscopes.
Product Specifications
| Model Part # | FS70L 378-186-1 | FS70L-TH 378-186-3 |
| Short Base Model Part # | FS70L-S 378-186-2 | FS70L-THS 378-186-4 |
| Focus adjustment | 50mm travel range with concentric coarse (3.8mm/rev) and fine (0.1mm/rev) focusing wheels (right / left) | |
| Image | Erect image | |
| Pupil distance | Siedentopf type, adjustment range: 2 - 3" / 51 - 76mm | |
| Field number | 24 | |
| Tilt angle | - | 0° - 20° |
| Optical pass ratio | 100/0 or 0/100 | |
| Protective filter | Built-in laser beam filter | |
| Tube lens | 1x | |
| Applicable laser | 1064/532/355nm | |
| Camera mount | Use a laser with TV port | |
| Illumination system, optional | Reflective illumination for bright field (Koehler illumination, with aperture diaphragm) 12V 100W fiber optics, non-stepped adjustment, light guide length: 1.5m, power consumption 150W | |
| Objective, optional (for observation) | M Plan Apo, M Plan Apo SL, G Plan Apo | |
| Objective, optional (for laser-cutting) | M/LCD Plan NIR, M/LCD Plan NUV | |
| Loading weight* | 31lbs / 14.2kg | 30lbs / 13.5kg |
| Mass (main unit) | 14lbs / 6.4kg | 15.5lbs / 7.2kg |
*Loading weight on optical tube excluding weight of objective lenses and eyepieces.
Turret Choices
| Supported observation | Bright field (M Plan Apo/G Plan Apo) | ||
| Model No. | 378-018 | 378-016A | 378-216A |
| Driving method | Manual | Electric | |
| Objective positions | 4 | 5 | |
Objective Choices
M Plan Apo Objectives: 1x, 2x, 5x, 7.5x, 10x, 20x, 50x or 100x
M Plan Apo Super Long (SL) Working Distance Objectives: 20x, 50x, 100x or 200x
M Plan Apo High Resolution (HR) Objectives: 50x or 100x
Compatible observation method: Bright-field observation, simple polarized observation, differential interference observation
Advantage: Plan apochromat lenses free of spherical aberration/chromatic aberration are adopted to obtain images with excellent color reproducibility without blur over the entire field of view.
G Plan Apo Objectives: 20x or 50x
Compatible observation method: Observation through a cover glass
Advantage: Correction design is performed so as to obtain optimal observation images when observing through the glass. (Corrected on the basis of BK7 and a cover glass thickness of 3.5mm. Custom order of other glass material and thickness is also available.)
M Plan Apo NIR Objectives: 5x, 10x, 20x, 50x or 100x
M Plan Apo NIR HR Objectives: 50x or 100x
Compatible observation method: Near-infrared radiation range objectives for bright field observation and laser applications.
Wavelength correction from visible to near-infrared (1800nm).
M Plan Apo NIR B Objectives: 20x or 50x
Compatible observation method: Near-infrared radiation range objectives for bright field observation and laser applications.
A high-transmission laser type objective suited to the fundamental and second harmonic of the YAG laser. Corrected over the visible (420nm) to near-infrared (1064nm) spectrum.
LCD Plan Apo NIR Objectives: 20x, 50x or 100x
Compatible observation method: Near-infrared radiation range objectives for bright field observation and laser applications through the LCD glass (with cover-glass thickness compensation).
Designed to observe a specimen through glass 1.1mm or 0.7mm thick.
M Plan Apo NUV Objectives: 10x, 20x, 50x or 100x
M Plan Apo NUV HR Objectives: 50x
Compatible observation method: Near-ultraviolet radiation range objectives for bright field observation and laser applications.
Performance optimized for near-ultraviolet (355nm) to visible.
LCD Plan Apo NUV Objectives: 20x, 50x or 100x
LCD Plan Apo NUV HR Objectives: 50x
Compatible observation method: Near-ultraviolet radiation range objectives for bright field observation and laser applications through the LCD glass (with cover-glass thickness compensation).
Designed to observe a specimen through glass 1.1mm or 0.7mm thick.
Optional Stand: For mounting the VMU, WIDE VMU, or FS70 microscope unit. Can be combined with an XY stage, stage illumination unit and fiber-optic illuminator to work as a compact microscope for surface observation.
Optional Illumination:
Stage illumination unit (Transmitted): Attaches to the stand to provide contour illumination in conjunction with a fiber-optic illuminator (100W or 150W).
Fiber-optic Illumination Unit (Reflective): 12V 100W Halogen illumination unit or 12V 150W Halogen illumination unit.
- Weight:
- 268.00 LBS
- Width:
- 40.00 (in)
- Height:
- 40.00 (in)
- Depth:
- 40.00 (in)
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